Scimago Journal & Country Rank

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Country United States  - SIR icon SIR Ranking of United States
H Index
Subject Area and CategoryEngineering
Electrical and Electronic Engineering
Mechanical Engineering

Materials Science
Electronic, Optical and Magnetic Materials
Nanoscience and Nanotechnology

Physics and Astronomy
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
PublisherS P I E - International Society for Optical Engineering
Publication typeJournals
ISSN19325134, 19325150
Scope The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) (formerly the Journal of Microlithography, Microfabrication, and Microsystems, 2002–2006) publishes peer-reviewed papers on the development of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, micro-optoelectromechanical systems, and photonics industries.


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The set of journals have been ranked according to their SJR and divided into four equal groups, four quartiles. Q1 (green) comprises the quarter of the journals with the highest values, Q2 (yellow) the second highest values, Q3 (orange) the third highest values and Q4 (red) the lowest values.

Atomic and Molecular Physics, and Optics2003Q2
Atomic and Molecular Physics, and Optics2004Q2
Atomic and Molecular Physics, and Optics2005Q2
Atomic and Molecular Physics, and Optics2006Q2
Atomic and Molecular Physics, and Optics2007Q2
Atomic and Molecular Physics, and Optics2008Q2
Atomic and Molecular Physics, and Optics2009Q3
Atomic and Molecular Physics, and Optics2010Q3
Atomic and Molecular Physics, and Optics2011Q3
Atomic and Molecular Physics, and Optics2012Q3
Atomic and Molecular Physics, and Optics2013Q3
Atomic and Molecular Physics, and Optics2014Q3
Atomic and Molecular Physics, and Optics2015Q3
Atomic and Molecular Physics, and Optics2016Q3
Atomic and Molecular Physics, and Optics2017Q3
Atomic and Molecular Physics, and Optics2018Q3
Condensed Matter Physics2003Q2
Condensed Matter Physics2004Q2
Condensed Matter Physics2005Q2
Condensed Matter Physics2006Q3
Condensed Matter Physics2007Q3
Condensed Matter Physics2008Q2
Condensed Matter Physics2009Q3
Condensed Matter Physics2010Q3
Condensed Matter Physics2011Q3
Condensed Matter Physics2012Q3
Condensed Matter Physics2013Q3
Condensed Matter Physics2014Q3
Condensed Matter Physics2015Q3
Condensed Matter Physics2016Q3
Condensed Matter Physics2017Q3
Condensed Matter Physics2018Q3
Electrical and Electronic Engineering2003Q2
Electrical and Electronic Engineering2004Q1
Electrical and Electronic Engineering2005Q2
Electrical and Electronic Engineering2006Q2
Electrical and Electronic Engineering2007Q2
Electrical and Electronic Engineering2008Q2
Electrical and Electronic Engineering2009Q2
Electrical and Electronic Engineering2010Q2
Electrical and Electronic Engineering2011Q2
Electrical and Electronic Engineering2012Q2
Electrical and Electronic Engineering2013Q2
Electrical and Electronic Engineering2014Q2
Electrical and Electronic Engineering2015Q2
Electrical and Electronic Engineering2016Q2
Electrical and Electronic Engineering2017Q2
Electrical and Electronic Engineering2018Q2
Electronic, Optical and Magnetic Materials2003Q2
Electronic, Optical and Magnetic Materials2004Q2
Electronic, Optical and Magnetic Materials2005Q2
Electronic, Optical and Magnetic Materials2006Q2
Electronic, Optical and Magnetic Materials2007Q3
Electronic, Optical and Magnetic Materials2008Q3
Electronic, Optical and Magnetic Materials2009Q3
Electronic, Optical and Magnetic Materials2010Q3
Electronic, Optical and Magnetic Materials2011Q3
Electronic, Optical and Magnetic Materials2012Q3
Electronic, Optical and Magnetic Materials2013Q3
Electronic, Optical and Magnetic Materials2014Q3
Electronic, Optical and Magnetic Materials2015Q3
Electronic, Optical and Magnetic Materials2016Q3
Electronic, Optical and Magnetic Materials2017Q3
Electronic, Optical and Magnetic Materials2018Q3
Mechanical Engineering2003Q2
Mechanical Engineering2004Q1
Mechanical Engineering2005Q1
Mechanical Engineering2006Q2
Mechanical Engineering2007Q2
Mechanical Engineering2008Q2
Mechanical Engineering2009Q2
Mechanical Engineering2010Q2
Mechanical Engineering2011Q2
Mechanical Engineering2012Q2
Mechanical Engineering2013Q2
Mechanical Engineering2014Q2
Mechanical Engineering2015Q2
Mechanical Engineering2016Q2
Mechanical Engineering2017Q2
Mechanical Engineering2018Q2
Nanoscience and Nanotechnology2003Q3
Nanoscience and Nanotechnology2004Q3
Nanoscience and Nanotechnology2005Q3
Nanoscience and Nanotechnology2006Q3
Nanoscience and Nanotechnology2007Q3
Nanoscience and Nanotechnology2008Q3
Nanoscience and Nanotechnology2009Q4
Nanoscience and Nanotechnology2010Q3
Nanoscience and Nanotechnology2011Q3
Nanoscience and Nanotechnology2012Q3
Nanoscience and Nanotechnology2013Q3
Nanoscience and Nanotechnology2014Q3
Nanoscience and Nanotechnology2015Q3
Nanoscience and Nanotechnology2016Q3
Nanoscience and Nanotechnology2017Q3
Nanoscience and Nanotechnology2018Q3

The SJR is a size-independent prestige indicator that ranks journals by their 'average prestige per article'. It is based on the idea that 'all citations are not created equal'. SJR is a measure of scientific influence of journals that accounts for both the number of citations received by a journal and the importance or prestige of the journals where such citations come from It measures the scientific influence of the average article in a journal, it expresses how central to the global scientific discussion an average article of the journal is.

Citations per document

This indicator counts the number of citations received by documents from a journal and divides them by the total number of documents published in that journal. The chart shows the evolution of the average number of times documents published in a journal in the past two, three and four years have been cited in the current year. The two years line is equivalent to journal impact factor ™ (Thomson Reuters) metric.

Cites per documentYearValue
Cites / Doc. (4 years)20020.000
Cites / Doc. (4 years)20031.147
Cites / Doc. (4 years)20041.880
Cites / Doc. (4 years)20051.704
Cites / Doc. (4 years)20061.369
Cites / Doc. (4 years)20071.116
Cites / Doc. (4 years)20081.008
Cites / Doc. (4 years)20091.089
Cites / Doc. (4 years)20101.397
Cites / Doc. (4 years)20111.282
Cites / Doc. (4 years)20121.160
Cites / Doc. (4 years)20131.198
Cites / Doc. (4 years)20141.268
Cites / Doc. (4 years)20151.450
Cites / Doc. (4 years)20161.522
Cites / Doc. (4 years)20171.348
Cites / Doc. (4 years)20181.203
Cites / Doc. (3 years)20020.000
Cites / Doc. (3 years)20031.147
Cites / Doc. (3 years)20041.880
Cites / Doc. (3 years)20051.704
Cites / Doc. (3 years)20061.330
Cites / Doc. (3 years)20071.135
Cites / Doc. (3 years)20081.081
Cites / Doc. (3 years)20091.113
Cites / Doc. (3 years)20101.392
Cites / Doc. (3 years)20111.269
Cites / Doc. (3 years)20121.201
Cites / Doc. (3 years)20131.223
Cites / Doc. (3 years)20141.415
Cites / Doc. (3 years)20151.588
Cites / Doc. (3 years)20161.498
Cites / Doc. (3 years)20171.364
Cites / Doc. (3 years)20181.318
Cites / Doc. (2 years)20020.000
Cites / Doc. (2 years)20031.147
Cites / Doc. (2 years)20041.880
Cites / Doc. (2 years)20051.611
Cites / Doc. (2 years)20061.340
Cites / Doc. (2 years)20071.000
Cites / Doc. (2 years)20081.028
Cites / Doc. (2 years)20091.045
Cites / Doc. (2 years)20101.352
Cites / Doc. (2 years)20111.260
Cites / Doc. (2 years)20121.250
Cites / Doc. (2 years)20131.417
Cites / Doc. (2 years)20141.557
Cites / Doc. (2 years)20151.606
Cites / Doc. (2 years)20161.509
Cites / Doc. (2 years)20171.475
Cites / Doc. (2 years)20181.316
Total Cites 

Evolution of the total number of citations and journal's self-citations received by a journal's published documents during the three previous years.
Journal Self-citation is defined as the number of citation from a journal citing article to articles published by the same journal.

Self Cites20020
Self Cites20031
Self Cites200414
Self Cites200520
Self Cites200610
Self Cites20076
Self Cites200818
Self Cites200924
Self Cites201039
Self Cites201129
Self Cites201220
Self Cites201326
Self Cites201438
Self Cites201545
Self Cites201661
Self Cites201754
Self Cites201846
Total Cites20020
Total Cites200339
Total Cites2004141
Total Cites2005242
Total Cites2006250
Total Cites2007218
Total Cites2008201
Total Cites2009197
Total Cites2010362
Total Cites2011368
Total Cites2012365
Total Cites2013252
Total Cites2014283
Total Cites2015362
Total Cites2016469
Total Cites2017476
Total Cites2018402
External Cites per Doc 
Cites per Doc

Evolution of the number of total citation per document and external citation per document (i.e. journal self-citations removed) received by a journal's published documents during the three previous years. External citations are calculated by subtracting the number of self-citations from the total number of citations received by the journal’s documents.

External Cites per document20020
External Cites per document20031.118
External Cites per document20041.693
External Cites per document20051.563
External Cites per document20061.277
External Cites per document20071.104
External Cites per document20080.984
External Cites per document20090.977
External Cites per document20101.242
External Cites per document20111.169
External Cites per document20121.135
External Cites per document20131.097
External Cites per document20141.225
External Cites per document20151.390
External Cites per document20161.304
External Cites per document20171.209
External Cites per document20181.167
Cites per document20020.000
Cites per document20031.147
Cites per document20041.880
Cites per document20051.704
Cites per document20061.330
Cites per document20071.135
Cites per document20081.081
Cites per document20091.113
Cites per document20101.392
Cites per document20111.269
Cites per document20121.201
Cites per document20131.223
Cites per document20141.415
Cites per document20151.588
Cites per document20161.498
Cites per document20171.364
Cites per document20181.318
% International Collaboration

International Collaboration accounts for the articles that have been produced by researchers from several countries. The chart shows the ratio of a journal's documents signed by researchers from more than one country; that is including more than one country address.

YearInternational Collaboration
Citable documents 
Non-citable documents

Not every article in a journal is considered primary research and therefore "citable", this chart shows the ratio of a journal's articles including substantial research (research articles, conference papers and reviews) in three year windows vs. those documents other than research articles, reviews and conference papers.

Non-citable documents20020
Non-citable documents20030
Non-citable documents20040
Non-citable documents20055
Non-citable documents200612
Non-citable documents200717
Non-citable documents200816
Non-citable documents200914
Non-citable documents201018
Non-citable documents201123
Non-citable documents201227
Non-citable documents201322
Non-citable documents201418
Non-citable documents201516
Non-citable documents201617
Non-citable documents201721
Non-citable documents201819
Citable documents20020
Citable documents200334
Citable documents200475
Citable documents2005142
Citable documents2006188
Citable documents2007192
Citable documents2008186
Citable documents2009177
Citable documents2010260
Citable documents2011290
Citable documents2012304
Citable documents2013206
Citable documents2014200
Citable documents2015228
Citable documents2016313
Citable documents2017349
Citable documents2018305
Cited documents 
Uncited documents

Ratio of a journal's items, grouped in three years windows, that have been cited at least once vs. those not cited during the following year.

Uncited documents20020
Uncited documents200318
Uncited documents200430
Uncited documents200574
Uncited documents2006106
Uncited documents2007106
Uncited documents2008116
Uncited documents2009108
Uncited documents2010125
Uncited documents2011167
Uncited documents2012168
Uncited documents2013121
Uncited documents201499
Uncited documents201599
Uncited documents2016139
Uncited documents2017163
Uncited documents2018143
Cited documents20020
Cited documents200316
Cited documents200445
Cited documents200573
Cited documents200694
Cited documents2007103
Cited documents200886
Cited documents200983
Cited documents2010153
Cited documents2011146
Cited documents2012163
Cited documents2013107
Cited documents2014119
Cited documents2015145
Cited documents2016191
Cited documents2017207
Cited documents2018181
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